I have cleaned many MAF sensors, and it is by far best to purchase the correct MAF cleaner to do so.. in fact a good electric contact cleaner will cost triple the cost of MAF cleaner and still leave a residue. I also killed one or I assume I did as it never would function correct after cleaning... I cleaned with carb cleaner I blamed that however I also used a q-tip so either or... now I know better I only use the pressure from the can and at that I'm careful not to get to close as to much pressure.
I work with a lot of electronics at work, microprocessors 6' tall, layered 2 deep inside a 3' wide case, I don't know much about electronics, however I have learned to use the correct cleaner, and method with cleaning any electronic sensor, board etc etc... For instance we used two different cleaners at one time a flammable (the good stuff) and a non flammable (ok left a lot of residue) the front side of the box had several units in the top, boards etc I was cleaning these (low voltage DC) however at the bottom was relays etc with 480 coming in.. after a cleaning that would make any government worker proud via working on a pension for amount used when using products provided solely by someone else money I cut the power back on... fireballs shot from every corner of the box, and the door went about 6' almost killing another microprocessor =!! well that's where I started somewhat following directions LOL... anyway the cost of replacement was actually more than the machine itself cost new (back in 1984 or so ~ $20,000) one good thing about contact cleaner you can assume anything you want, and it does leave a residue but when lit off with 480 everything pretty much settles out into a nice black silicon valley smell I never knew what happened to that door etc but that was it for the good ole flammable contact cleaner... Ha sorry for the long story just reminded me when I was reading over the post.